metal gate process flow
由LWu著作·2013—OnestepfromtypicalCMOSprocessflowisthesource/drain(S/D)activationannealing,whichthegatestackmustundergo.ThetypicalS/D ...,Ametalgate,inthecontextofalateralmetal–oxide–semiconductor(MOS)stack,isthegateelectrodeseparatedbyanoxidefrom...
Fabrication of replacement metal gate devices
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ReferringtoFIG.2,ablock/flowdiagramshowsamethodforpolishingforformingreplacementhigh-kmetalgatestructures.Inoneembodiment,threepolishing ...
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